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Comparative study of the residual stress development in HMDSN-based organosilicon and silicon oxide coatings
Comparative study of the residual stress development in HMDSN-based organosilicon and silicon oxide coatings
2020
Montgomery Jaritz
Christian Hopmann
Stefan Wilski
Lara Inga Kleines
Lars Banko
Dario Grochla
Alfred Ludwig
Rainer Dahlmann
Keywords:
Organosilicon
Residual stress
Analytical chemistry
Composite material
Silicon oxide
Physics
Correction
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