Evaporative heat management of collectors grazing incidence for EUV lithography

Mirror cooling means (150) for a collector (100) with grazing incidence (GIC), comprising: GIC mirror shell (110) with a reflective inner surface (166) and an opposite outer surface (168); a jacket (160) having an inner surface and coupled to the GIC mirror shell (110) to define a chamber (180) with front and rear end, a steam line (240) extends (in liquid exchange the registering communication with the chamber 180) (at the rear end 170L, 170T) located; at least one capillary layer (200M, 200J), disposed immediately adjacent to and in thermal contact with the outer surface of the GIC mirror shell (110); a conduit, which supports at least one capillary layer (200M, 200J) and defining a vapor line (240); and a condensation system (250) in fluid-exchange with authorized communication with the conduit and with the at least one capillary layer (200M, 200J), wherein the at least one capillary layer (200M, 200J) is constructed to the capillary flow of a cooling fluid (172) (from the condensation system 250 ) support through the conduit and through the chamber (180) and a counter-flow of coolant vapor (174) through the chamber (180) (through the steam line 240) and (the condensation system 250).