Extraction of ions and electrons from audio frequency plasma source

Herein, the extraction of high ion / electron current from an audio frequency (AF) nitrogen gas discharge (10 – 100 kHz) is studied and investigated. This system is featured by its small size (L= 20 cm and inner diameter = 3.4 cm) and its capacitive discharge electrodes inside the tube and its high discharge pressure ∼ 0.3 Torr, without the need of high vacuum system or magnetic fields. The extraction system of ion/electron current from the plasma is a very simple electrode that allows self-beam focusing by adjusting its position from the source exit. The working discharge conditions were applied at a frequency from 10 to 100 kHz, power from 50 – 500 W and the gap distance between the plasma meniscus surface and the extractor electrode extending from 3 to 13 mm. The extracted ion/ electron current is found mainly dependent on the discharge power, the extraction gap width and the frequency of the audio supply. SIMION 3D program version 7.0 package is used to generate a simulation of ion trajectories as a r...