Method and system for making a coated article with annealing

The invention relates to a method and a system for making a coated article (2) by deposition (I) at least one transparent conductive metal oxide layer (3) on a substrate (5). The deposition (I) is carried out at a low temperature of the substrate (5). Subsequently, the coating (3) is subjected to a heat treatment (II) by a laser irradiation apparatus (200) or to a temperature treatment (II) in a high-convection furnace (300) or in a two-chamber furnace (350). The surface texture (3a) of the coating (3) can then be selectively adjusted by an etching step (III).