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Pyroelectric Heat Detection for Calibrated Measurement of Atomic Layer Deposition Reaction Heat
Pyroelectric Heat Detection for Calibrated Measurement of Atomic Layer Deposition Reaction Heat
2021
Ashley R. Bielinski
Emily A. Sprague-Klein
Brian T. Phelan
Alex B. F. Martinson
Keywords:
Atomic layer deposition
Pyroelectricity
heat detection
Materials science
Optoelectronics
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