Tracking Control of an Uncertain MEMS Resonator via Adaptive Terminal Sliding Mode Control

The purpose of this study is to develop the adaptive terminal sliding mode scheme to control a MEMS resonator with a six-powered potential function for tracking a given reference signal in the presence of system uncertainties and external disturbances. The proposed adaptive controller includes the time-varying feedback gains can tackle the nonlinear dynamics without directly eliminating. Meanwhile, these time-varying feedback gains are adaptively updated according to the suitable updated rules without the known bounds of system uncertainties and external disturbances. Some sufficient conditions to guarantee the stability based on Lyapunov theory and numerical simulations are performed to demonstrate the effectiveness of the presented scheme.