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Beol Compatible High-Capacitance Mimcap Structure Using ZrO2 with Enhanced Dielectric Constant
Beol Compatible High-Capacitance Mimcap Structure Using ZrO2 with Enhanced Dielectric Constant
2020
Paul C. Jamison
John Massey
Ando Takashi
Eduard A. Cartier
P. J. Chen
Hemanth Jagannathan
Eric Liu
Sebastian Naczas
Vijay Narayanan
Shanti Pancharatnam
Phillip Restle
Alex Romero
Joshua M. Rubin
Nicolas Loubet
Kisik Choi
Keywords:
Dielectric
Materials science
Optoelectronics
Compatibility (mechanics)
high capacitance
Correction
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