Equations for predicting airborne cleanliness in non-unidirectional airflow cleanrooms
2016
Equations are derived in this paper for predicting the airborne concentration of particles and
microbe-carrying particles in non-unidirectional airflow cleanrooms during manufacturing. The
equations are obtained for a variety of ventilation systems with different configurations for mixing
fresh and recirculated air, air filter placements, and number and efficiency of air filters. The
variables in the equations are air supply rate, airborne dispersion rate of contamination from
machinery and people, surface deposition of particles from air, particle concentration in fresh makeup
air, proportion of make-up air, and air filter efficiencies. The equations are amenable to relatively
simple modification for the study of different cleanroom ventilation systems. The use of these
equations to investigate the effect of different configurations of ventilation systems and the relative
importance of the equation variables on airborne concentrations will be reported in a further paper.
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