Equations for predicting airborne cleanliness in non-unidirectional airflow cleanrooms

2016 
Equations are derived in this paper for predicting the airborne concentration of particles and microbe-carrying particles in non-unidirectional airflow cleanrooms during manufacturing. The equations are obtained for a variety of ventilation systems with different configurations for mixing fresh and recirculated air, air filter placements, and number and efficiency of air filters. The variables in the equations are air supply rate, airborne dispersion rate of contamination from machinery and people, surface deposition of particles from air, particle concentration in fresh makeup air, proportion of make-up air, and air filter efficiencies. The equations are amenable to relatively simple modification for the study of different cleanroom ventilation systems. The use of these equations to investigate the effect of different configurations of ventilation systems and the relative importance of the equation variables on airborne concentrations will be reported in a further paper.
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