A kind of three electrode driver of plane and preparation method thereof

The present invention relates to electric pulse driving and igniting and detonation fields, and in particular to a kind of three electrode driver of plane and preparation method thereof.Driver includes: substrate；Three electrode layers: being arranged on substrate, including anode, cathode and trigger electrode, and anode and cathode is bilateral symmetry semicircular structure, and main electrode gap is provided between anode and cathode, and trigger electrode is arranged between the anode and cathode, and closer apart from cathode；Polymer film flying layer: polymer film flying is placed on three electrode layers, and reserves pad area in the end of anode, cathode and trigger electrode；Accelerate thorax: being placed in above polymer film flying layer, acceleration thorax is hollow cylindrical, and the bore diameter of thorax is accelerated to be designed according to three electrode sizes, and the place that discharge-induced explosion occurs for three electrodes need to be completely covered.The application passes through directly using three electrode switch of plane as driver, simplifies the structure of drive system.The application prepares three electrode driver of plane using MEMS technique, and mass production may be implemented.