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Magnetic Mirror Type Magnetron Sputtering Cathode for Low Gas Pressure Operation
Magnetic Mirror Type Magnetron Sputtering Cathode for Low Gas Pressure Operation
2019
Yuuto Kawato
Taisei Motomura
Minami Kajiwara
Tatsuo Tabaru
Masato Uehara
Tetsuya Okuyama
Keywords:
Sputter deposition
Optoelectronics
gas pressure
Magnetic mirror
Cathode
Materials science
Correction
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