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MICROFABRICATED THERMAL PRE-CONCENTRATOR WITH INTEGRATED CANTILEVER-BASED RESONANT SENSORS
MICROFABRICATED THERMAL PRE-CONCENTRATOR WITH INTEGRATED CANTILEVER-BASED RESONANT SENSORS
2016
C. Carron
Patrick Getz
M. Navaei
G McMurray
Oliver Brand
Keywords:
Thermal
Optoelectronics
Concentrator
Cantilever
Materials science
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