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Etch Characteristics of Copper Thin Films in Inductively Coupled Plasma of Piperidine/Ethanol/Ar Gas Mixture
Etch Characteristics of Copper Thin Films in Inductively Coupled Plasma of Piperidine/Ethanol/Ar Gas Mixture
2021
Eun Taek Lim
Ji Soo Lee
Sung Yong Park
Chee Won Chung
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