Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor

The large-area capacitive discharges driven at very high frequencies have been attracting much attention due to their wide applications in material etching and thin film deposition. However, in the regime, the standing wave effect (SWE) becomes a major limitation for plasma material processing uniformity. In this work, a fiber Bragg grating sensor was utilized for the observation of the SWE in a large-area capacitive discharge reactor by measuring the radial distribution of the neutral gas temperature T g. The influences of the RF power and the working pressure on the radial profiles of T g were studied. At a higher frequency (100 MHz) and a lower pressure (5 Pa), T g presents a center-peaked radial distribution, indicating a significant SWE. As the RF power increases, the central peak of T g becomes more evident due to the enhanced SWE. By contrast, at 100 MHz and a higher pressure (40 Pa), the radial distribution of T g shows an evident peak at the electrode edge and T g decays dramatically towards the ...