Fast Infrared Photovoltaic Responses of Mn Doped ZnO Thin Films Synthesized by PLD Method

ZnO thin films with different Mn doping amounts were prepared on fused quartz substrate by pulsed laser deposition (PLD) method. XRD test showed that the Mn doped ZnO films were hexagonal wurtzite and had mainly (002) peaks. Mn 2+ was a substitution of Zn 2+ in the films, which led to lattice expansion. Absorption spectrum revealed that Mn doping changed the band gap of the films, and furthermore changed the absorption ability of the ZnO films. The films also had fast infrared photovoltaic responses, which increased with the increase of the laser energy and the Mn content.