Research of a Micro-Displacement Compensation Mechanism Based on Piezoelectric Actuator

A kind of micro-displacement compensation mechanism driven by piezoelectric ceramic (actuator is) researched and designed. Adopting the actuator as the micro-displacement driver and a flexible joint as the guiding device, this mechanism compensates the moving position of the traditional lead-screw driven of working table machine tools automatically and realizes the secondary precise (positioning). In this paper, a kind of flexible joint is designed, the working table can be positioned to 0.01 μm, which meets the need of many high precision and super-high precision manufacturing fields.