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Physical Analysis of Remained Oxidation Byproducts as the Origins of Lattice Distortion at 4H-SiC Surface
Physical Analysis of Remained Oxidation Byproducts as the Origins of Lattice Distortion at 4H-SiC Surface
2019
Adhi Dwi Hatmanto
Koji Kita
Keywords:
Fourier transform infrared spectroscopy
Analytical chemistry
Distortion
Lattice (order)
Materials science
surface strain
lattice distortion
Correction
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