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Angular and strain dependence of heavy-ions induced degradation in SOI FinFETs
Angular and strain dependence of heavy-ions induced degradation in SOI FinFETs
2009
Griffoni
Gérardin
Meneghesso
Paccagnella
Simoen
Claeys
Keywords:
Degradation (geology)
Strain (chemistry)
heavy ion irradiation
Ion
High-κ dielectric
Silicon on insulator
Silicon
Molecular physics
Materials science
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