3D integration of memories including heterogeneous integration
2021
In this invited paper, 3D integration technology of memories including heterogeneous integration is overviewed. Especially, in 3D integration of memory part, 3D NAND/NOR memory, 3D crosspoint memory with ReRAM and PCM, and 3D STT-MRAM are discussed for realizing high density and so on. Moreover, heterogeneous integration is shown from view point of multifunctional capability.
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