Old Web
English
Sign In
Acemap
>
Paper
>
P-1.7: Atomic-Layer-Deposition Deposited Superlattice-Structure Al-Zn-O Films for Thin Film Transistors Application
P-1.7: Atomic-Layer-Deposition Deposited Superlattice-Structure Al-Zn-O Films for Thin Film Transistors Application
2021
Jingyi Wang
Junchen Dong
Qi Li
Dengqin Xu
Yi Wang
Dedong Han
Keywords:
Superlattice
Materials science
Optoelectronics
Atomic layer deposition
Thin-film transistor
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]