Surface micromachining on a polymethylmethacrylate substrate using visible laser-induced backside wet etching with a KMnO4 solution as an absorber

In this paper, the authors report a method for continuous trench micromachining on polymethylmethacrylate (PMMA). Visible laser-induced backside wet etching (v-LIBWE) on PMMA using a potassium perm...