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Intrinsic color centers in 4H-silicon carbide formed by heavy ion implantation and annealing
Intrinsic color centers in 4H-silicon carbide formed by heavy ion implantation and annealing
2021
Takuma Kobayashi
Maximilian Rühl
Johannes Lehmeyer
Leonard K.S. Zimmermann
Michael Krieger
Heiko B. Weber
Keywords:
Optoelectronics
Silicon carbide
annealing
heavy ion
Materials science
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