A 320×240 I-ToF CMOS Image Sensor with 2-Tap 5.6μm Pixel and Mismatch-Nonlinearity Suppression

This paper presents a 320×240 indirect time of flight (I-ToF) image sensor with 5.6µm×5.6µm 2-Tap pixel in 110nm process. The readout channel offset cancellation and nonlinearity suppression techniques are proposed to achieve high-precision detection. The measured relative precision is 1% at a 5m target distance and non-linearity is below 1.02%. The chip also integrates LVDS and I2C interface for data transmission and Laser control. This work effectively improved the ranging accuracy with a simple method.