Improving AlN Crystal Quality and Strain Management on Nano‐Patterned Sapphire Substrates by High Temperature Annealing for UVC‐LEDs

2020

BMBF, 03ZZ0134B, Zwanzig20 - Advanced UV for Life - Verbundvorhaben: UV Power; TP2: Entwicklung von high-power UVB-LEDs um 300 nm

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