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Embedded MEMS modules for BiCMOS process
Embedded MEMS modules for BiCMOS process
2010
Kaynak
Ehwald
Drews
Scholz
Korndörfer
Wipf
Barth
Birkholz
Schulz
Wolansky
Tillack
Keywords:
Microelectromechanical systems
Electrical engineering
Lithography
bicmos process
bicmos integrated circuits
Silicon
Inductor
Computer science
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