The structure, oxygen vacancies and magnetic properties of TiOx (0 < x < 2) synthesized by plasma assisted chemical vapor deposition and reduction

Abstract TiO 2 thin film was deposited by Plasma Assisted Chemical Vapor Deposition (PECVD), and TiO x (0  x thin film, which could bring large impacts on the magnetic properties of the thin films. A higher concentration of oxygen vacancies resulted in larger ferromagnetic behaviors.