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3D-stacked Highly Strained SiGe/Ge Gate-All-Around (GAA) pFETs Fabricated by 3D Ge Condensation
3D-stacked Highly Strained SiGe/Ge Gate-All-Around (GAA) pFETs Fabricated by 3D Ge Condensation
2019
J. Suh
Andrew C. Meng
T. R. Kim
A.F. Marshall
A. Pakzad
P.C. McIntyre
K.C. Saraswat
Keywords:
Condensation
Optoelectronics
Materials science
Correction
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