Reliability evaluation of a silicon-on-silicon MCM-D package

Abstract This paper presents the results of reliability testing on a multichip module technology with active silicon substrates. The modules use flip-chip technology to attach silicon chips to the active substrate and this assembly is then packaged into a plastic ball grid array package. Performance was evaluated using two custom designed test chips incorporating thermal, thermomechanical, electrical and reliability test structures. A rigorous environmental test sequence including temperature, cycling, humidity, highly accelerated stress test and power cycling were carried out on the demonstrators. A full destructive physical analysis was then performed, consisting of die/substrate shear, wire bond pull tests and microsectioning.