Influence of Parameters of a Non-self-sustaining Glow Discharge with an Elongated Hollow Cathode on the Degree of Inhomogeneity of the Generated Plasma

2020 
The article presents the results of studying the influence of the parameters of a glow discharge in a non-self-sustaining mode on the degree of inhomogeneity of the generated plasma inside an elongated hollow cathode with a length of 300 mm and an inner diameter of a cavity of 25 mm, at a glow discharge voltage of up to 250 V and at a pressure of up to 1 Pa.
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