Multi-Step Operation of Piezoelectric RF-MEMS Tunable Capacitor

The piezoelectric RF-MEMS tunable capacitor having the divided piezoelectric actuator to realize multi-step operation was studied. The results of structural analysis indicated that the divided actuator enabled to differ gap between movable electrodes and fixed electrode in capacitor area originated in curling over width direction. The fabricated tunable capacitor showed 6-step operation and maximum capacitance 0.70 pF at 600 MHz with actuation voltage 5.2 V. As a result, the tunable capacitor having the divided actuator was successfully fabricated to provide multi-step operation.