Photonic integrated chip, optical device with an integrated photonic chip and process for their preparation

The invention relates to a photonic integrated chip (2) having a substrate (20), a plurality on an upper surface (21) of the substrate (20) layers of material, an optical waveguide (in one or several wave-conducting layers of material of the chip 2) is integrated, and a formed in the optical waveguide grating (60) having a beam deflection of guided in the waveguide radiation in the direction of the layer plane of the wave-guiding layer of material or the wave-conducting layers of material out or a beam deflection of einzukoppelnder into the waveguide radiation in the direction in effect in the layer plane of the wave-guiding layer of material or the wave-conducting layers of material. According to the invention it is provided that located in an above or below the optical grating coupler (60) material layer of the chip (2) or more above or below the optical grating coupler (60) disposed layers of material or on the backside of the substrate (20) has an optical diffraction and refractive structure (100, 100a) is integrated, which makes a beam shaping of the radiation before coupling into the waveguide, or after the coupling out of the waveguide.