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Measurement of Mechanical Properties of Electroplated Nickel Thin Film for MEMS Application
Measurement of Mechanical Properties of Electroplated Nickel Thin Film for MEMS Application
2003
Dc Back
Ts Park
Soon Bok Lee
Nk Lee
Th. Choi
Kh Na
Keywords:
Electroplating
Thin film
Microelectromechanical systems
Nickel
Composite material
Materials science
electroplated nickel
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