Technology of coating TiN film on inner face of stainless steel pipe by sputtering at low temperature

A surface treatment setup of coating TiN film on the inner face of stainless steel pipe vacuum chamber for accelerators at low temperature is described.A series of surface treatment parameters have been achieved through many coating experiments on a stainless steel pipe which is 86 mm in diameter and 2 000 mm in length.The test results show that TiN film of the best quality could be coated on the inner face of stainless steel pipe under 80～90 Pa and 160~180 ℃,and the deposition rate achieves 0.145 nm/s.The secondary electron yield of the coated chamber decreases distinctly compared with that of the uncoated chamber.