Kathodenzerstäubungsgerät for forming a metal film using a magnetic field

Kathodenzerstaubungsgerat, with: a sputtering chamber (30) having an area in the same, which is for receiving a substrate (34) determines, during a layer on the substrate (34) is formed by sputtering; a target (32) disposed within the atomizing chamber (30), wherein the front of the target (32) indicating to the region through the substrate (34) during the sputtering occupied; and a magnetic field generator (40) with a main magnetic field generation part (405) which is the back of the target (32) opposite and offset horizontally from a vertical axis passing through the center of the target (32), wherein the main magnetic field generation part (405) comprises a first (405c) and a second (405d) magnet and said first magnet (405c) comprises two arcuate magnetic segments defining a ring, whereby the ends of the arcuate magnetic segments are spaced from each other and a first opening (405a) and a second opening define (405b) disposed along a diametrical line ...