Post-irradiation effect of Deuterium ion beam onto Rh/W/Cu multilayer thin film

Abstract The fabrication of mirror like multilayer Rh/W/Cu thin films via Pulsed Laser Deposition technique is reported in this paper. These multilayer thin film mirrors were irradiated to 10, 20 and 30 keV energy of Deuterium ion beam. The post-irradiation effects onto the quality of these thin films were investigated by subjecting them to X-ray Diffractometer, Scanning Electron Microscope, Atomic Force Microscope, Ultraviolet (UV)–Visible and Far Infrared (FIR) spectrometer.