A 10 W On-Chip Switched Capacitor Voltage Regulator With Feedforward Regulation Capability for Granular Microprocessor Power Delivery

Granular power delivery with per-core regulation for microprocessor power delivery has the potential to significantly improve the energy efficiency of future data centers. On-chip switched capacitor converters can enable such granular power delivery with per-core regulation given a high efficiency, high power density, fast response time, and high output power converter design. This paper details the implementation of an on-chip switched capacitor voltage regulator in a $32\,\mathrm{n}\mathrm{m}$ SOI CMOS technology with deep trench capacitors. A novel feedforward control for reconfigurable switched capacitor converters is presented. The feedforward control reduces the output voltage droop following a transient load step. This leads to a reduced minimum microprocessor supply voltage, thereby reducing the overall power consumption of the microprocessor. The implemented on-chip switched capacitor voltage regulator provides a $0.7-1.1$ V output voltage from $1.8$ V input. It achieves a $85.1\%$ maximum efficiency at $3.2\,\mathrm{W}\mathrm{/}\mathrm{m}\mathrm{m}^2$ power density, a subnanosecond response time with improved minimum supply voltage capability, and a maximum output power of $10\,\mathrm{W}$ . For an output voltage of $850\,\mathrm{m}\mathrm{V}$ , the feedforward control reduces the required voltage overhead by $60\,\mathrm{m}\mathrm{V}$ for a transient load step from $10\%$ to $100\%$ of the nominal load. This can reduce the overall power consumption of the microprocessor by $7\%$ .