Thermal Compensation for High Load Spatial Light Modulators in Real-Time

Peter J. Christopher,Ralf Mouthaan,Andrew Kadis,Nadeem Gabbani,William O’Neill,Timothy D. Wilkinson

Thermal Compensation for High Load Spatial Light Modulators in Real-Time

2020

Peter J. Christopher
Ralf Mouthaan
Andrew Kadis
Nadeem Gabbani
William O’Neill
Timothy D. Wilkinson

We introduce a concurrent real-time calibration process for diffractive lithography using liquid crystal spatial light modulators. This allows for increased power handling capabilities for given phase modulation accuracy.

Keywords:

Thermal
Electronic engineering
high load
Materials science

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