Sputtered NdFeB-films of high coercivity

H. Homburg,Th. Sinnemann,S. Methfessel,M. Rosenberg,Benxi Gu

Sputtered NdFeB-films of high coercivity

1990

H. Homburg
Th. Sinnemann
S. Methfessel
M. Rosenberg
Benxi Gu

Abstract Thin Nd(Dy)FeB-films prepared by rf-magnetron sputtering with different substrate temperatures and deposition rates were investigated for their magnetic and structural properties.

Keywords:

Sputtering
High-power impulse magnetron sputtering
Coercivity
Nuclear magnetic resonance
Physics
Neodymium magnet
Condensed matter physics
Deposition (law)
Substrate (chemistry)

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