Enhanced Humidity Sensing Response of SnO2/Silicon Nanopillar Array by UV Irradiation

In this work, a silicon nanopillar array was created with nanosphere lithography. SnO2 film was deposited on this nanostructure by magnetron sputtering to form an SnO2/silicon nanopillar array sensor. The humidity sensitivity, response time, and recovery time were all measured at room temperature (25 °C) with UV or without UV irradiation. As a result, the humidity sensitivity properties were improved by enlarging the specific surface area with ordered nanopillars and irradiating with UV light. These results indicate that nanostructure sensors have potential applications in the field of sensors.