Old Web
English
Sign In
Acemap
>
Paper
>
J2230101 Investigation of electrostatic liner actuators by electret MEMS
J2230101 Investigation of electrostatic liner actuators by electret MEMS
2014
Tatsuhiko Sugiyama
Mitsuru Aoyama
Yasushi Shibata
Gen Hashiguchi
Keywords:
Linear actuator
Actuator
Electret
Microelectromechanical systems
Electronic engineering
Materials science
Mechanical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]