A Transparent ZnO nanowire MEMS Gas Sensor prepared by an ITO Micro-Heater

Abstract This sturdy constructs a 3D-like heterogeneous device integrated structure using a transparent ZnO nanowire MEMS gas sensor and a blue LED. For the transparent gas sensor, ITO is used for the electrodes and the micro heater. The thermal image shows that the micro heater provides a heat source. The sensors exhibit a higher sensitivity to NO than other gases (C2H5OH, HCHO, H2S) at the optimal operating temperature of 200℃. For the MEMS gas sensor with blue light illumination from the bottom of the sensors, the results show that the blue light increases the carrier concentration in the ZnO nanowires. The response value to 50 ppb NO gas is increased from 48.13% to 86.17%.