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Impact of Auxiliary Anode on Discharge Characteristics in High Power Impulse Magnetron Sputtering
Impact of Auxiliary Anode on Discharge Characteristics in High Power Impulse Magnetron Sputtering
2016
Li Chunwei
Tian Xiubo
Gong Chunzhi
Xu Jianping
Sun Mengfan
Keywords:
High-power impulse magnetron sputtering
Anode
Electrical engineering
Engineering
Science, technology and society
Imagination
Chemical substance
Correction
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