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Development of Schmidt type Lobster eye optics using MEMS technology
Development of Schmidt type Lobster eye optics using MEMS technology
2021
Sae Sakuda
Yuichiro Ezoe
Kumi Ishikawa
Masaki Numazawa
Daiki Ishi
Aoto Fukushima
Tomoki Uchino
Ayata Inagaki
Yoko Ueda
Hiromi Morishita
Luna Sekiguchi
Yukine Tsuji
Takatoshi Murakawa
Kazuhisa Mitsuda
Yoshiaki Kanamori
Kohei Morishita
Keywords:
X-ray optics
Materials science
Deep reactive-ion etching
Optics
Microelectromechanical systems
Correction
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