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HCl Selective Etching of SiGe versus Si in Stacks Grown on (110)
HCl Selective Etching of SiGe versus Si in Stacks Grown on (110)
2010
Jean-Michel Hartmann
Vincent Destefanis
G. Rabille
Stephane Monfray
Keywords:
Etching
Materials science
Inorganic chemistry
Stack (abstract data type)
Optoelectronics
Correction
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