MeV Ion Irradiation Effects on the Luminescence Properties of Si-implanted SiO2-thin Films

Thawatchart Chulapakorn,Ilya Sychugov,Sethu Saveda Suvanam,Jan Linnros,Daniel Primetzhofer,Anders Hallén

MeV Ion Irradiation Effects on the Luminescence Properties of Si-implanted SiO2-thin Films

2016

Thawatchart Chulapakorn
Ilya Sychugov
Sethu Saveda Suvanam
Jan Linnros
Daniel Primetzhofer
Anders Hallén

The effects of MeV heavy ion irradiation at varying fluence and flux on excess Si, introduced in SiO2 by keV ion implantation, are investigated by photoluminescence (PL). From the PL peak wavelengt ...

Keywords:

Ion implantation
Thin film
Radiochemistry
Fluence
Nuclear magnetic resonance
Irradiation
Photoluminescence
Luminescence
Ion
Chemistry
heavy ion irradiation
Atomic physics

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