Fabrication of Raman biochip prototype by femtosecond laser micromachining

In this work, a nanoscale surface-enhanced Raman scattering (SERS) substrate is fabricated by fs laser reduction and deposition. The conductive silver microstructures are also deposited in fs laser irradiated area on the glass surfaces. Based on this approach, we integrate the microelectronic circuit and micro-Raman substrate into a microfluidic chamber and form a prototype of Raman biochip for biosensing. Enhancement of Raman signal and control of temperature of the sensor are both achieved. This technique provides a great potential for integrating microelectronics and micro-Raman sensors on a single glass chip.