Rod-type ultrasonic mini-motor based on bending vibration mode

A rod-type piezoelectric ultrasonic micro-motor based on bending vibration mode withimproving construction was studied experimentally in this paper. The prototype motor with diameterof 15 mm and length of 25 mm has demonstrated its super characteristics such as very high resolution(0.01°), low speed with large torque output (30 r/min ~ 70 r/min and 0.55 kg. cm etc. and it has beensuccessfully applied to precise positioner with multi-freedom for laser resonant cavity.