Electrical test structures for the characterisation of optical proximity correction
2007
Simple electrical test structures have been designed that will allow the characterisation of corner serif forms of
optical proximity correction. The structures measure the resistance of a short length of conducting track with a
right angled corner. Varying amounts of OPC can be applied to the outer and inner corners of the feature and the
effect on the resistance of the track measured. These structures have been simulated and the results are presented
in this paper. In addition a preliminary test mask has been fabricated which has test structures suitable for
on-mask electrical measurement. Measurement results from these structures are also presented. Furthermore
structures have been characterised using an optical microscope, a dedicated optical mask metrology system, an
AFM scanner and finally a FIB system. In the future the test mask will be used to print the structures using a
step and scan lithography tool so that they can be measured on-wafer. Correlation of the mask and wafer results
will provide a great deal of information about the e ects of OPC at the CAD level and the impact on the final
printed features.
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- Correction
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