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Crystallization of Silicon Layers with a Scanned Electron Beam
Crystallization of Silicon Layers with a Scanned Electron Beam
2009
K. Hafner
H. Morgner
J.-P. Heinß
Keywords:
Crystallization
Cathode ray
Analytical chemistry
Electron beam physical vapor deposition
Ion beam deposition
Electron beam-induced deposition
Nanocrystalline silicon
Silicon
Materials science
Optoelectronics
microcrystalline silicon
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