Development of high-resolution active matrix spatial light modulator

We developed a high-resolution active matrix spatial light modulator on a glass substrate. To integrate a switching device on the glass substrate, we designed a high-performance oxide thin-film transistor with a minimum channel length of 1  μm and a maximum processing temperature of 380°C. To drive a large number of data lines, we used multiple source drivers and data drivers as well. For an optical modulation, we optimized a liquid crystal of a high anisotropic refractive index of 0.25 with a cell gap of 2.5  μm, which was effectively operated until pixel pitch is 1.6  μm. Hologram was successfully reconstructed by fabricated SLM with 7-μm pixel pitch. For the other approach for a high-resolution spatial light modulator, we tested a phase change material of Ge2Sb2Te5 [GST]. The variation of refractive index between a polycrystalline phase and an amorphous phase of the GST film is used for a hologram reconstruction. By optimizing the underlying oxide thickness, we can show a color hologram without color filters.