MEMS and their applications in optical signal processing and beamforming for phased array antennas

2001 
A fast analogue phase-only SLM has been developed from MEMS technology. This device has been developed primarily for its speed and currently operates at 30 kHz. It has potential applications in many optical signal processing systems, the optical beamformer for the control of phased array antennas being the first to benefit.
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